发明名称 A CLEANING COMPOUND FOR REMOVING PHOTORESIST
摘要 <p>A cleaning composition for removing photoresist includes a dimethylsulfone, a quaternary ammonium hydroxide, characterized in that further includes a surfactant, the surfactant is a hydroxyl-containing polyether. The cleaning composition including the surfactant of the hydroxyl-containing polyether is used to clean photoresist on the metal, metal alloy or dielectric substrate.</p>
申请公布号 WO2008049332(A1) 申请公布日期 2008.05.02
申请号 WO2007CN03021 申请日期 2007.10.22
申请人 ANJI MICROELECTRONICS (SHANGHAI) CO., LTD.;PENG, LIBBERT, HONGXIU;SHI, ROBERT, YONGTAO;LIU, BING 发明人 PENG, LIBBERT, HONGXIU;SHI, ROBERT, YONGTAO;LIU, BING
分类号 G03F7/42;C11D1/83;C23G1/06;H01L21/02 主分类号 G03F7/42
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