FACILITY CONNECTION POSITIONING TEMPLATE

摘要

A facility connection positioning template is provided to simply couple a facility conduit to a wafer processing tool by using a plurality of openings formed on a template. A facility conduit installing apparatus includes a plate-shaped template(200) suitable for a facilities integration. A plurality of openings(202) are formed on the plate-shaped template. The openings are aligned in a predetermined position pattern. The opening is configured to position a facility conduit passing therethrough to simply couple the positioned facility conduit to a wafer processing tool. Wafer manufacture equipment is provided with a bottom unit. The bottom unit includes a plurality of protruded fasteners being extended to an upper surface of the bottom unit. The plate-shaped template is detachably coupled to the upper surface of the bottom unit. The plate-shaped template is configured to receive the fasteners. A plurality of recesses are formed on the plate-shaped template to allow it to be coupled to the upper surface of the bottom unit.