INDUCTIVELY COUPLED PLASMA REACTOR WITH MULTI ANTENNA AND MULTI ANTENNA DRIVING SYSTEM

摘要

An inductively coupled plasma reactor having multi antenna and a multi antenna driving system for the same are provided to generate uniform high density plasma inside a vacuum chamber by operating the multi antenna with a current balancing circuit. An inductively coupled plasma reactor comprises a plurality of radio frequency antennas(321), a vacuum chamber(300), a dielectric window(323), and a magnetic core cover(322). The vacuum chamber has a substrate supporting part(330) which a processed substrate(W) is mounted on. The dielectric window is installed in the upper part of the vacuum chamber and has a trench area(327). The plurality of the radio frequency antennas are installed on an upper side of the trench area. The magnetic core cover is installed in the trench area to be covered along the plurality of the radio frequency antennas and to enable a magnetic flux inlet to face an inside of the vacuum chamber.