MULTI-DIRECTIONAL MECHANICAL SCANNING IN AN ION IMPLANTER

摘要

This invention relates to a scanning arm assembly for multi-directional mechanical scanning of a semiconductor wafer or other substrate to be implanted. The present invention provides a scanning arm assembly comprising a pair of drive arms connected by two linkage arms to form a quadrilateral. Rotary joints are provided to join adjacent arms together, and a substrate holder is provided on one linkage arm where it joins the other linkage arm. Thus, rotating the drive arms causes the substrate holder to move. Suitable control of the drive arms allows the substrate holder to be moved through an ion beam to follow many different paths and hence implant patterns.