发明名称 PRODUCT DESIGNED TO BE USED WITH HANDLING SYSTEM
摘要 A product (Pr) can be used in the semiconductor, MEM, flat screen and/or solar cell industries, where the product is capable of being gripped by a handling system (Bm). The product can include: a plate (1) made of silicon, quartz, silicon carbide, silicon nitride, arsenic, and/or gallium arsenide, comprising one first (2) and one second (3) opposite faces, a plateau (4) defined by at least one face (5) opposite the plate, an attachment means (7) of the plate (1) on the plateau (4) so that the at least one face (5) of the plateau (4) is opposite the first (2) or second (3) face of the plate, and a first gripping means (11) mounted in association with the plateau (4), where these said first gripping means is able to cooperate and is removable with second gripping means (12) in addition to the first gripping means (11), the second additional gripping means belonging to the handling system. Another embodiment of the invention is directed to a system for handling the product.
申请公布号 WO2008007223(A3) 申请公布日期 2008.05.02
申请号 WO2007IB02907 申请日期 2007.06.27
申请人 RECIF TECHNOLOGIES;PROCESSE, JEAN MICHEL;HADDAD, FLORENT;GAUDON, ALAIN 发明人 PROCESSE, JEAN MICHEL;HADDAD, FLORENT;GAUDON, ALAIN
分类号 H01L21/683 主分类号 H01L21/683
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