PROBE MODULE AND METHOD OF MANUFACTURING THE SAME

摘要

A probe module and a manufacturing method thereof are provided to realize a simple structured probe module by forming first conductive lines contacted to an electrode of a target and second conductive lines contacted to a driving chip of the target on a substrate in one body. First conductive lines(140) are formed on a substrate(110) to be contacted to electrodes of a target. Second conductive lines(150) are extended from the first conductive lines on the substrate. The second conductive lines are contacted to a driving chip for driving the target. Intervals of the second conductive lines are wider than those of the first conductive lines. The substrate has plural trenches accommodating the first and second conductive lines. Seed layers(130) are formed on lower surfaces of the trenches. An dielectric(120) is disposed between the substrate and the seed layers. Supporting beams are formed on the first conductive lines.