ELEVATING DRIVE APPARATUS FOR A ELEVATOR OF THE LOAD-LOCK CHAMBER

摘要

An elevating drive apparatus for an elevator of a load-lock chamber is provided to prevent the collision of a robot arm for a transfer and the damage of a wafer by forming a linear movement detecting unit additionally. A lead screw(106a) is screw-coupled to an elevating driving shaft(104b) of an elevator(104) so that the elevator elevates according to the rotation thereof. A step motor(106c) rotates the lead screw. An encoder(106d) measures the revolution of the step motor. A control unit(108) controls the operation of the step motor. The control unit checks whether the step motor is exactly operated through the encoder. A linear movement detecting unit(106e) measures the elevation of the elevator to send it to the control unit. The linear movement detecting unit makes the control unit check whether the elevator elevates up to the target spot by comparing it with the rotated value of the step motor transmitted from the encoder.