发明名称 TUNNEL-TYPE MAGNETIC DETECTING ELEMENT AND METHOD FOR MANUFACTURING THE SAME
摘要 [PROBLEMS] To provide a tunnel-type magnetic detecting element, especially a tunnel-type magnetic detecting element using Al-O for an insulating barrier layer, by which a high resistance change ratio (?R/R) can be obtained with a low RA, and to provide a method for manufacturing such tunnel-type magnetic detecting element. [MEANS FOR SOLVING PROBLEMS] On a second fixed magnetic layer (4c), an insulating barrier layer (5) is formed by using a lower insulating layer (5a) formed of Al-O and an upper insulating layer (5b) formed of CoFe-O on the lower insulating layer (5a). Furthermore, a free magnetic layer (6) is formed on the insulating barrier layer (5). Thus, a high resistance change ratio (?R/R) and a low RA (element resistance ROElement area A) can be obtained.
申请公布号 WO2008050790(A1) 申请公布日期 2008.05.02
申请号 WO2007JP70700 申请日期 2007.10.24
申请人 ALPS ELECTRIC CO., LTD.;TANAKA, KENICHI;UMETSU, EIJI;IKARASHI, KAZUAKI 发明人 TANAKA, KENICHI;UMETSU, EIJI;IKARASHI, KAZUAKI
分类号 H01L43/10;G11B5/39;H01L43/08;H01L43/12 主分类号 H01L43/10
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