| 摘要 |
<p>The invention relates to a method, wherein a tetrachlorosilane- containin g reactant gas is reacted with a hydrogen-containing reactant gas at a tempe rature from 900°C to 1300°C. A trichlorosilane-containing product mixture is produced, which is characterized in that the reaction takes place at a supe rcritical pressure of the reactant gases.</p> |
