发明名称 PROCESS FOR MARKING A SEMI-CONDUCTOR PLATE FOR ITS IDENTIFICATION AND THE SEMI-CONDUCTOR PLATE MARKED BY THIS PROCESS
摘要 Process for marking a semi-conductor plate for its identification and semi-conductor plate marked by this process The invention relates to a process for marking a plate (1) in semi-conductor material for its identification. In this process, the focus is on the bundle (3) of a laser (2) in the volume of the plate (1) on points of this volume. Such focusing is realized so as to locally modify, within the area of the points (4, the optical properties of the material of the plate (1). All of the points (4) of the volume of the plate (1) whose optical properties have been modified are positioned within the marking zone (8) and define a code that identifies the plate (1). The objective of the invention is to minimize the pollution during the marking of the plate and that induced later during the fabrication based on this substrate (1).
申请公布号 WO2008025919(A3) 申请公布日期 2008.05.02
申请号 WO2007FR51811 申请日期 2007.08.10
申请人 MICROCOMPOSANTS DE HAUTE SECURITE MHS;BOCQUENE, DOMINIQUE;TAUZINAT, PIERRE 发明人 BOCQUENE, DOMINIQUE;TAUZINAT, PIERRE
分类号 H01L23/544 主分类号 H01L23/544
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