METHOD FOR FORMING TRENCH IN SEMICONDUCTOR DEVICE,申请号KR20020036723-传众专利搜索

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发明名称	METHOD FOR FORMING TRENCH IN SEMICONDUCTOR DEVICE
摘要
申请公布号	KR100826965(B1)	申请公布日期	2008.05.02
申请号	KR20020036723	申请日期	2002.06.28
申请人		发明人
分类号	H01L21/76	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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