POLISHING HEAD, POLISHING DEVICE, AND WORKPIECE REMOVAL METHOD

摘要

PROBLEM TO BE SOLVED: To provide a polishing head or the like that allows a workpiece to be easily, safely, and surely removed from a polishing cloth by elevating the polishing head holding the workpiece without forming a groove in the polishing cloth or without overhanging the polishing head from a surface plate.

SOLUTION: The polishing head 11 has a disk-like carrier 13 having an annular protruding part 13a and a carrier latching part 13b respectively formed at its peripheral edge part, a disk-like head body 12 having an annular head-body latching part 12a formed to its outside, a diaphragm 14 coupling the head body and the carrier with each other, and a spacer 15 formed at the carrier latching part and/or at a part of the head-body latching part while being located between the carrier latching part and the head-body latching part. When the head body is elevated, the carrier latching part and/or the head-body latching part are/is brought into contact with the spacer so as to remove the workpiece W from the polishing cloth while inclinedly lifting the carrier.

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