| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a member for a vacuum chuck composed of a porous alumina sintered compact having excellent adsorption power, an adsorption rate and durability, and having a smooth adsorption face with a high flattening degree, and to provide its production method. <P>SOLUTION: The member for a vacuum chuck is composed of a porous alumina sintered compact satisfying: a condition (a) where the content of alumina is ≥98 wt.%; a condition (b) where the average crystal grain size is 10 to 40 μm; a condition (c) where the mode size of a through-pore distribution measured by a valve point process is 1.5 to 4.0 μm; a condition (d) where the maximum through-pore size measured by the above process is 10 to 20 μm; a condition (e) where the porosity is 30 to 50%; and a condition (f) where gas permeation quantity when air is permeated at the gas pressure of 100 kPa is ≥2,000 mm<SP>3</SP>/mm<SP>2</SP>/sec. The production method uses the same. <P>COPYRIGHT: (C)2008,JPO&INPIT |
