| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and a method for inspecting whether an optical modulator is operating normally in a chip state, which can prevent a defective optical modulator from being transferred to subsequent processes, such as, packaging of the optical modulator or manufacture of display units, and which can significantly reduce the cost in the manufacturing cost. SOLUTION: An inspection system for optical modulator, is equipped with a probe card that provides a drive signal, by converting the input control signal into a drive signal and contacting each drive signal input pads of the optical modulator, where the optical modulator has one or more micromirrors, with each one or more of drive signal inputs being connected to one or more micromirrors; the micromirrors that generate a control signal for confirming the quality of the probe card that moves in the vertical directions by the drive signal input through the drive signal input pads; and a video control circuit that generates a control signal that confirms the propriety of the malfunction of the optical modulator, and is electrically connected to the probe card and transmits the control signal. COPYRIGHT: (C)2008,JPO&INPIT
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