| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaluation device of a pressure sensor and an evaluation method of the pressure sensor, capable of evaluating a hysteresis. SOLUTION: This evaluation device 1 of the pressure sensor has in a stator 10, a fluctuating oil-pressure chamber 13 wherein a detection surface of the pressure sensor is exposed to the inside, and has in a rotator 22, a low oil-pressure chamber 27 filled with a low-pressure hydraulic oil, a high oil-pressure chamber 28 filled with a high-pressure hydraulic oil, and an intermediate oil-pressure chamber 29 filled with an intermediate-pressure hydraulic oil. The rotator 22 has the first channel communicating the low oil-pressure chamber 27 with the fluctuating oil-pressure chamber 13, the second channel communicating the high oil-pressure chamber 28 with the fluctuating oil-pressure chamber 13, and the third channel communicating the intermediate oil-pressure chamber 29 with the fluctuating oil-pressure chamber 13. Communication by only one channel between the first to third channels is permitted through rotation by a motor 20, and thereby a pressure to be applied through the hydraulic oil onto the detection surface of the pressure sensor exposed to the inside of the fluctuating oil-pressure chamber 13 is switched. COPYRIGHT: (C)2008,JPO&INPIT
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