| 摘要 |
PROBLEM TO BE SOLVED: To provide a cutting tool with a film by PVD or PECVD enhanced with wear resistance and resistance force against damage caused by heat. SOLUTION: In this cutting tool, a wear resistant film is applied to a substrate of cemented carbide, etc. The film has a multilayered structure in which a plurality of metal oxide layers by PVD or PECVD are alternately laminated in a form of Me<SB>1</SB>X+Me<SB>2</SB>X+Me<SB>1</SB>X+Me<SB>2</SB>X ... The metal Me<SB>1</SB>and Me<SB>2</SB>are one or more kinds of Ti, Nb, V, Mo, Zr, Cr, Al, Hf, Ta, Y and Si. At least one kind of the Me<SB>1</SB>X and Me<SB>2</SB>X is a nanocomposite layer of metal oxide made of components A and B different in composition and structure + metal oxide. Each of the components A and B is a solid solution of a single oxide phase of one kind of metal element or two or more kinds of metal oxide. The Me<SB>1</SB>X layer and Me<SB>2</SB>X layer are different in one or both of composition and structure, and thickness in each of the layers is larger than 0.4 nm and smaller than 50 nm. Thickness of the whole of the multilayered structure film in which the layers are alternately laminated is 0.2 to 20μm. COPYRIGHT: (C)2008,JPO&INPIT
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