| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generating device maintaining a gap between dielectric plates constant by minimizing deformation of an electrode. <P>SOLUTION: A pair of dielectric plates 52, 52' are detachably installed to a nozzle head 50. For this, top ends of the dielectric plates 52, 52' are pinched into a soft-landing slit 49 formed at a lower part of a chamber housing 46, while lower ends of the same 52, 52' are placed at a stepped part 59 formed at a lower end of an electrode cover 58 to have the dielectric plates fixed. Further, in order to maintain a gap 53h between the dielectric plates 52, 52', a spacer 64 is inserted into both ends of the gap 53. In such a structure, a gap between the dielectric plates can be maintained constant, so that there are such advantages that uniform plasma can be formed, and that exchange and maintenance of dielectric plates can be made easier. <P>COPYRIGHT: (C)2008,JPO&INPIT |
