| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a nanowire or ring structure having a bend in the middle with high controllability. SOLUTION: After metal fine particles 12 are formed on a semiconductor substrate 11, a nanostructure having nodes 14a, 14b inserted in the middle of nanowires 13a to 13c is formed by carrying out VLS (vapor liquid solid) growth while alternately switching a first material gas and a second material gas, and nodes 14a, 14b coupled to the ends of nanowires 13a to 13c are thinned and then subjected to selective epitaxial growth to selectively form rings 15a, 15b around the nodes 14a, 14b, respectively. COPYRIGHT: (C)2008,JPO&INPIT
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