发明名称 SEMICONDUCTOR DEVICE INCLUDING COPPER INTERCONNECT AND METHOD FOR MANUFACTURING THE SAME
摘要 Semiconductor device includes a semiconductor element, a copper interconnect electrically connected to the semiconductor element, a barrier layer containing metal capable of suppressing diffusion and oxidation of copper and continuously covers top and side surfaces of the copper interconnect, and an adhesive layer formed on a top surface of the barrier layer.
申请公布号 US2008099919(A1) 申请公布日期 2008.05.01
申请号 US20070865219 申请日期 2007.10.01
申请人 ROHM CO., LTD. 发明人 OZAWA KOICHI
分类号 H01L21/4763;H01L23/52 主分类号 H01L21/4763
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