发明名称 |
Quartz guard ring centering features |
摘要 |
An electrode assembly and method of centering an outer ring around an electrode assembly in a plasma reaction chamber used in semiconductor substrate processing. The method includes positioning the outer ring around an outer surface of a backing member of the electrode assembly, and inserting at least one centering element between the outer ring and the backing member. The centering element can be a plurality of spring-loaded centering elements received in a cavity on the outer surface of the backing member, the centering elements having a first end adapted to contact the outer ring and a second end adapted to receive a spring. The outer ring surrounds an outer surface of the backing member, such that the plurality of spring-loaded centering elements are positioned between the outer surface of the backing member and an inner surface of the outer ring.
|
申请公布号 |
US2008099120(A1) |
申请公布日期 |
2008.05.01 |
申请号 |
US20070701507 |
申请日期 |
2007.02.02 |
申请人 |
LAM RESEARCH CORPORATION, FREMONT, CALIFORNIA USA. |
发明人 |
LARSON DEAN J.;BROWN DANIEL;COMENDANT KEITH;WANG VICTOR |
分类号 |
B31B1/60 |
主分类号 |
B31B1/60 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|