LIQUID SUPPLY DEVICE AND ITS STARTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of suppressing the abrasion or vibration of a seal ring at the time of starting of a liquid supply device and capable of efficiently utilizing a liquid for sterilizing or rinsing a container. SOLUTION: A lift mechanism 210 is provided to allow the seal ring 14 to fall to set a state the seal walls 14a of the seal ring 14 are separated from the undersurface of a manifold 11 at the time of starting of the liquid supply device to wet the upper parts of the seal walls 14a of the seal ring 14. Thereafter, the seal ring 14 is raised to be brought into close contact with the manifold 11 and the friction of the seal ring 14 with the undersurface of the manifold 11 is prevented from becoming large. Further, the leak of the liquid from the gap between the seal ring 14 and the manifold 11 is prevented by a seal member 203 and a fixing ring 200. COPYRIGHT: (C)2008,JPO&INPIT