发明名称 |
SYSTEMATIC YIELD IN SEMICONDUCTOR MANUFACTURE |
摘要 |
Three-dimensional structures are provided which improve manufacturing yield for certain structures in semiconductor devices. The three-dimensional structures take into account the interaction between an upper layer and a lower layer where the lower layer has a tendency to form a non-planar surface due to its design. Accordingly, structures built on a layer above the lower layer are formed on a more planar surface and thus are more likely to function properly. The changes to improve manufacturing yield are made at the design stage rather than at the fabrication stage.
|
申请公布号 |
US2008104568(A1) |
申请公布日期 |
2008.05.01 |
申请号 |
US20070966135 |
申请日期 |
2007.12.28 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BERGERON PAUL H.;HIBBELER JASON D.;TELLEZ GUSTAVO E. |
分类号 |
G06F17/50;H01L23/52 |
主分类号 |
G06F17/50 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|