Mirror Device, Mirror Array, Optical Switch, Mirror Device Manufacturing Method, and Mirror Substrate Manufacturing Method

摘要

A mirror device includes a mirror ( 153 ) which is supported to be pivotable with respect to a mirror substrate ( 151 ), a driving electrode ( 103 - 1 - 103 - 4 ) which is formed on an electrode substrate ( 101 ) facing the mirror substrate, and an antistatic structure ( 106 ) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.