Thermally conductive, electrically insulating material and production method thereof

摘要

Means for a thermally conductive and electrically insulating material 1 containing an AlN crystal 150 mainly comprising AlN, and a production method thereof. In production, a molten aluminum layer is formed on an AlN substrate 11 with at least its surface comprising AlN in an atmosphere of a non-oxidizing gas, and the molten aluminum layer is then heated in an atmosphere of N₂ gas to form an AlN crystal 150 which mainly comprises an AlN layer 125 . The means are also a thermally conductive and electrically insulating material having an AlN crystal and an Al gradient layer, and a production method thereof. In production, a heating step of forming a molten aluminum layer 15 on the AlN layer 125 and heating it in an atmosphere of N₂ gas is repeated at least twice or more. At this time, the amount of the N₂ gas dissolved in the molten aluminum layer is decreased as the heating step is repeated.