| 摘要 |
PROBLEM TO BE SOLVED: To vaporize a droplet reliably by restraining variations in droplet size while controlling the droplet size of a liquid raw material discharged to an evaporization chamber. SOLUTION: A vaporizer has: a raw material liquid chamber 410 into which the liquid raw material is supplied by prescribed pressure; a plurality of raw material discharge nozzles 420 for discharging the liquid raw material in the raw material liquid chamber; a vaporization chamber 430 for vaporizing the liquid raw material discharged from the plurality of raw material discharge nozzles to generate a feed gas; and a piezoelectric element 440 changing the volume of a space in the raw material liquid chamber periodically to add discharge pressure to the liquid raw material. COPYRIGHT: (C)2008,JPO&INPIT
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