发明名称 THIN FILM TRANSISTOR SUBSTRATE AND FABRICATING METHOD THEREOF
摘要 A thin film transistor substrate and fabricating method thereof, the thin film transistor substrate including a substrate, a gate line and a gate electrode, each including a metal adhesion layer and a Cu alloy layer disposed on the substrate, an active layer and an ohmic contact layer disposed over the gate electrode, a gate insulating layer disposed between the gate electrode and the active and ohmic contact layers, source and drain electrodes disposed on the ohmic contact layer, and a data line connected to the source electrode.
申请公布号 US2008099765(A1) 申请公布日期 2008.05.01
申请号 US20070923914 申请日期 2007.10.25
申请人 发明人 KIM DO-HYUN;LEE JE-HUN;JEONG CHANG-OH
分类号 H01L29/04;H01L21/336 主分类号 H01L29/04
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