| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a micro-actuator coil. <P>SOLUTION: The manufacturing method for a micro-actuator coil includes a step for preparing a substrate 100, a step for forming a plurality of trenches 112 to form coils above the substrate 100, a step for covering the remaining part except a plurality of the trenches 112 above the substrate 100 with a shielding agent 120, a step for performing electroplating of a conductive material 130 on a plurality of the trenches 112, and a step for forming a passivation layer on the substrate 100. It is possible hereby to reduce changes in coil cross-sectional area while minimizing wafer warpage so as to reduce power consumption and a drive current applied for driving coils. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
