发明名称 |
Apparatus and method for measuring and monitoring layer properties in web-based processes |
摘要 |
An apparatus and method for measuring and monitoring layer properties in web-based processes are described. The apparatus includes multiple electrode devices adjacently positioned on a surface of a web material, which advances with a predetermined speed. The electrode devices perform measurements of electrical parameters of a layer of the web material and provide an electrical signal to a layer deposition system for further adjustment of layer properties of the layer.
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申请公布号 |
US2008100302(A1) |
申请公布日期 |
2008.05.01 |
申请号 |
US20060590349 |
申请日期 |
2006.10.30 |
申请人 |
JACKSON WARREN;TAUSSIG CARL |
发明人 |
JACKSON WARREN;TAUSSIG CARL |
分类号 |
G01R31/08 |
主分类号 |
G01R31/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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