发明名称 Apparatus and method for measuring and monitoring layer properties in web-based processes
摘要 An apparatus and method for measuring and monitoring layer properties in web-based processes are described. The apparatus includes multiple electrode devices adjacently positioned on a surface of a web material, which advances with a predetermined speed. The electrode devices perform measurements of electrical parameters of a layer of the web material and provide an electrical signal to a layer deposition system for further adjustment of layer properties of the layer.
申请公布号 US2008100302(A1) 申请公布日期 2008.05.01
申请号 US20060590349 申请日期 2006.10.30
申请人 JACKSON WARREN;TAUSSIG CARL 发明人 JACKSON WARREN;TAUSSIG CARL
分类号 G01R31/08 主分类号 G01R31/08
代理机构 代理人
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