发明名称 NON-VOLATILE MEMORY AND MANUFACTURING METHOD AND ERASING METHOD THEREOF
摘要 A non-volatile memory is provided, including a control gate, a floating gate, a gate oxide layer, a source region, a drain region, a first dielectric layer, a second dielectric layer, and an erase gate. The control gate is disposed in a substrate. The floating gate comprising a coupling part and a gate part is disposed over the control gate and located over a portion of the substrate with the gate oxide layer there-between. The source region adjoins with one side of the gate part, while the drain region adjoins with the other side of the gate part. The first dielectric layer is disposed on the floating gate. The second dielectric layer is disposed on the sidewalls of the floating gate. The erase gate is disposed over the coupling part of the floating gate and covers the first dielectric layer and the second dielectric layer.
申请公布号 US2008099818(A1) 申请公布日期 2008.05.01
申请号 US20060552993 申请日期 2006.10.26
申请人 EPISIL TECHNOLOGIES INC. 发明人 HUNG CHIH-LUNG
分类号 H01L29/788;H01L21/8238 主分类号 H01L29/788
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