NOZZLE PLATE, METHOD FOR PRODUCING NOZZLE PLATE, DROPLET DISPENSING HEAD, METHOD FOR PRODUCING DROPLET DISPENSING HEAD, AND DROPLET DISPENSING DEVICE

摘要

A nozzle plate includes: a flow channel opening in a first surface of the nozzle plate; a liquid chamber communicating with the flow channel; and a nozzle hole communicating with the liquid chamber and opening in a second surface of the nozzle plate. The liquid chamber has a flat portion which is substantially parallel to the second surface. The nozzle hole communicates with the liquid chamber in the flat portion. A method for producing a nozzle plate includes: forming a liquid chamber which opens in a first surface of a plate-like body; forming a flat portion in a bottom of the liquid chamber; and forming a nozzle hole which communicates with the flat portion and opens in a second surface of the plate-like body.