| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for efficiently forming an amorphous inorganic solid electrolyte layer that is high in lithium-ion conductivity. <P>SOLUTION: The inorganic solid electrolyte layer forming method is a method for forming a thin film, composed of an inorganic solid electrolyte including lithium, phosphorus, and sulfur as elements on a base material. A vapor growth method or a chemical vapor deposition method (a CVD method) is used while the base material is cooled to <25°C. <P>COPYRIGHT: (C)2008,JPO&INPIT |
