摘要 |
PROBLEM TO BE SOLVED: To provide a chemical vapor deposition method for depositing a metal oxide coating having a substantial thickness, especially, a tin oxide coating at high deposition speed of at least 130Å/sec on a moving glass ribbon in a float bath during a glass production process; and to provide the coated glass obtained by the method. SOLUTION: A tetrachloride of a metal corresponding to the metal oxide coating to be deposited is used, and tin tetrachloride is used when the tin oxide coating is deposited. As an oxygen source, an organic oxygen-containing compound, preferably an ester having an alkyl group with aβ-hydrogen is used. COPYRIGHT: (C)2008,JPO&INPIT
|