| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of liquid droplet discharge head, which manufactures the liquid droplet discharge head by a simple working procedure without using an exclusive facility and device, and also to provide a manufacturing method of liquid droplet ejector. SOLUTION: The method comprises the processes of: making out a laminated substrate by joining a cavity substrate wherein the end wall of a discharge chamber serves as an oscillating board and an electrode substrate wherein an individual electrode which counters the oscillating board and actuates the oscillating board with a separating gap between the oscillating board and the individual electrode; forming a recess 5a which is used as a nozzle hole 5 for discharging a liquid droplet transferred from the discharge chamber in a silicon substrate 1' used as a nozzle substrate 1; sticking the cavity substrate to compose the laminated substrate to the surface where the recess 5a of the silicon substrate 1' is formed after forming the recess 5a in the silicon substrate 1'; and making the recess 5a opened by grinding the silicon substrate 1' for making it thinner and using it as the nozzle hole 5. COPYRIGHT: (C)2008,JPO&INPIT
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