| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for removing vapor deposition material, by which apparatus and method, sintered pellets composed of the vapor deposition material stuck on the inside wall of a vapor deposition crucible can be easily and surely removed without deforming and breaking the vapor deposition crucible. SOLUTION: The sintered pellet 3 in the vapor deposition crucible 1 is removed by striking and breaking with a chisel 23 reciprocating at a high speed. The chisel 23 integratedly comprises a center striking portion 23B for striking the central portion of the surface of the sintered pellet 3, and an outer periphery striking portion 23C which surrounds the periphery of the center striking portion 23B and strikes the outer peripheral portion of the surface of the sintered pellet 3, wherein the center striking portion 23B projects further forward than the outer periphery striking portion 23C, and preferentially strikes the central portion of the surface of the sintered pellet 3. COPYRIGHT: (C)2008,JPO&INPIT
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