| 摘要 |
PROBLEM TO BE SOLVED: To suppress a change in a converging angle due to the difference in the distances up to a measuring object. SOLUTION: Laser light emitted from an interference optics 2 is made to condense onto an object surface to be measured of the measuring object 100 by using a light-condensing optics 3. Then, reflecting light reflected by the surface of the measuring object 100 is returned to the interference optics 2 through the light-condensing optics 3, and an interference of the refecting light and reference light is observed at the interference optics 2. Before carrying out measurement, a movement controller 9 measures the distance from the object surface to be measured of the measuring object 100, by using a distance sensor 8 and moves the light-condensing optics 3 along its optical axis direction by using a moving stage 7, such that the distance between the light-condensing optics 3 and the object surface to be measured of the measuring object 100, which is obtained from the distance measured by the distance sensor 8, agrees with the fixed focal distance of the light-condensing optics 3. COPYRIGHT: (C)2008,JPO&INPIT
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