| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensing element capable of preventing formation of inappropriate current-carrying paths between electrode pads and solid electrolytic layers in a sensing element which is provided with the electrode pads and includes a chamfered part, and to provide manufacturing method of the sensing element and a sensor provided with the sensing element. <P>SOLUTION: Since electrode pads 30-34 and 36 are formed at locations separated from the chamfered part 45, it then becomes possible for the sensor element 4 to secure longer distances, from the electrode pads 30-34 and 36 to the solid electrolytic layer (a detection element 20 and a heater 22), via a side surface of an insulating layer 37, in comparison with the case of forming the electrode pads in a region in contact with the chamfered part. The electrode pads 30-34 and 36 and the solid electrolytic layer thereby become less apt to be electrically connected to each other via other members (such as exfoliated pieces, which occur when electrode pads are scraped) that exist in the side surface of the insulating layer 37. <P>COPYRIGHT: (C)2008,JPO&INPIT |
