MANUFACTURING METHOD OF PATTERN FORMING BODY

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a pattern forming body, which prevents the leakage of a resin at the time of imprinting. SOLUTION: The manufacturing method of the pattern forming body has: a resin layer-to-be-transferred forming process of using a substrate having a lyophilic layer and a liquid repelling layer formed on its surface and coating the lyophilic layer with a coating solution for forming a resin layer to be transferred to form the resin layer to be transferred; an adhesion laminate forming process for closely adhering a mold having an uneven pattern part to the resin layer to be transferred to form an adhesion laminate; and a curing process for curing the resin layer to be transferred of the adhesion laminate. COPYRIGHT: (C)2008,JPO&INPIT