| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing technology for improving an emission property of a cold cathode electron source. <P>SOLUTION: An electron emission part 3 including carbon nanotubes (CNTs) 4 and carbon impurities 5 is formed on a cathode electrode 2. The CNTs 4 are exposed from the impurities 5 by irradiating the laser to the emission part 3 at a irradiation density of 0.7-8.6 MW/cm<SP>2</SP>. Thereby, the CNTs 4, which are in horizontally lying states before irradiation of the laser, are raised and an emission property of the electron source is improved. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
