Radiation sensor i.e. infrared sensor, has thermopiles array on substrate with six-cornered membrane surfaces which form hexagonal arrangement without free space between individual membrane surfaces

摘要

The sensor has an array of thermopiles (5) on a substrate with membrane surfaces (10a), and formed on thermocouples (7) that are connected in series. The thermopiles are located on the membrane surfaces with an absorber (9). The membrane surfaces are 6 cornered or 8 cornered in shape. The 6-cornered membrane surfaces form a hexagonal arrangement without free space between the individual membrane surfaces. Bases are designed thinner than thickness of the substrate.