发明名称 |
SUBSTRATE CARRYING APPARATUS, SUBSTRATE CARRYING METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE |
摘要 |
A substrate conveyance device that conveys a substrate having been exposed with a pattern image via a projection optical system and a liquid, the substrate conveyance device comprising: a liquid detector that detects the liquid adhering on the substrate. |
申请公布号 |
EP1672681(A4) |
申请公布日期 |
2008.04.30 |
申请号 |
EP20040792152 |
申请日期 |
2004.10.07 |
申请人 |
ZAO NIKON CO., LTD.;NIKON CORPORATION |
发明人 |
OHTA, ATSUSHI;HORIUCHI, TAKASHI |
分类号 |
H01L21/027;G03F7/20 |
主分类号 |
H01L21/027 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|