| 摘要 |
A piezoelectric thin-film resonator and a filter are provided to enhance the performance of the filter by suppressing the distribution of oscillation energy in a resonator. A piezoelectric thin-film resonator includes a bottom electrode(43), a piezoelectric thin-film(44), and a top electrode(45). The bottom electrode is installed to form a space(46) in a substrate(41). The piezoelectric thin-film is formed on the bottom electrode. The top electrode is formed on the piezoelectric thin-film so as to implement a resonance part(47) opposite to the bottom electrode between the piezoelectric thin-film. At least one of the bottom and top electrodes includes a wiring(48) for extracting signals from the resonance part on the space. The mass per area of the bottom and top electrodes contacted to the piezoelectric thin-film in the wiring is less than that formed in the resonance part.
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