METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERTER AND PHOTOELECTRIC CONVERTER

摘要

Disclosed is a method of manufacturing a photoelectric conversion element including a substrate (1) and a stacked body configured of a plurality of compound semiconductor layers (2, 3, 4) of different compositions sequentially stacked on the substrate (1), and having at least one pn junction in the stacked body. This method includes the steps of forming the stacked body configured of the plurality of compound semiconductor layers (2, 3, 4) of different compositions sequentially stacked on the substrate (1); forming a protective film (5) on the stacked body; forming a groove (8) by removing at least a portion of the stacked body by at least one method selected from the group consisting of a mechanical removing method, dry etching and laser scribing; etching a side wall of the groove (8) using an etching solution after forming the protective film (5) and the groove (8); and cutting a portion corresponding to the groove (8) for separation into a plurality of photoelectric conversion elements. Also disclosed is a photoelectric conversion element obtained by this method.