Micromechanical unit for e.g. use in light deflector, has resonance frequency adjusting device adjusting resonance frequency of oscillation system such that positions of spring hangers of hanger assembly are changed to one another

摘要

The micromechanical unit has an oscillation system, which has an oscillation body (11) i.e. deflection mirror. The oscillation body is hanged up in a swingable manner using an elastic hanger assembly (12) having two spring hangers (12a, 12b). A resonance frequency adjusting device adjusts a resonance frequency of the oscillation system such that positions of the spring hangers of the hanger assembly are changed to one another. The body (11) is swingably supported under utilization of the spring hangers at a support body (22). An independent claim is also included for a method for the operation of a micromechanical unit.