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发明名称
Ein Lichtbestrahlungsverfahren und ein Lichtbestrahlungsapparat
摘要
申请公布号
DE602004007756(T2)
申请公布日期
2008.04.30
申请号
DE200460007756T
申请日期
2004.12.02
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD.
发明人
KANAZAKI, EMI;SHIBATA, SATOSHI;KAWASE, FUMITOSHI
分类号
H01L21/00;H01L21/265;C23C16/48;C30B25/10;H01L21/26
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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