| 摘要 |
<p>A liquid processing apparatus, a liquid processing method, and a storage medium are provided to recognize a drop or a loading of a coating liquid from a coating liquid nozzle by imaging a state of a front end of the coating liquid nozzle with an imaging unit. A nozzle bus loads a coating liquid nozzle(10) and waits it. A nozzle transfer device transfers the coating liquid nozzle between an upper portion of a substrate supported on a substrate supporting unit(41) and the nozzle bus. An imaging unit(17) images a front end of the coating liquid nozzle transferred by the nozzle transfer device. A determining unit determines dropping or loading of a coating liquid from the front end based on the imaging result from the imaging unit. A control unit(9) controls a coating liquid supply unit(70) and/or the nozzle transfer device to perform a management operation when the determining unit determines that the drop or the loading of the coating liquid is generated.</p> |
