NANO-WIRE CAPACITOR AND MANUFACTURING METHOD THEREOF
摘要
A capacitor using a nano-wire and a method for manufacturing the same are provided to implement miniaturization and integration of a capacitor by using a nano structure. A method for manufacturing a capacitor using a nano-wire includes the steps of: forming a lower metal layer on a substrate(10); growing a conductive nano-wire(11) having a metal and a transparent electrode on the lower metal layer; depositing a dielectric substance on the lower metal layer having the grown conductive nano-wire; growing a dielectric nano-wire(21) on the deposed dielectric substance; and deposing an upper metal layer on the dielectric substance having the grown dielectric nano-wire.
申请公布号
KR20080035363(A)
申请公布日期
2008.04.23
申请号
KR20060101986
申请日期
2006.10.19
申请人
SAMSUNG ELECTRO-MECHANICS CO., LTD.
发明人
MOON, WON HA;CHOI, CHANG HWAN;LIM, CHUL TACK;HWANG, YOUNG NAM