| 摘要 |
A micro-electromechanical (MEM) device includes a proof mass (10) resiliently mounted to a substrate (28). The proof mass has first (32a) and second (32b) combs formed on opposite sides thereof and is electrically coupled to ground. A fixed drive comb (22) is interleaved with the first comb (32a) of the proof mass. A fixed pick-off comb (24) is interleaved with a portion of the second comb (32b) of the proof mass (10). A fixed bias comb (34a) is interleaved with the second comb (32b) of the proof mass (10). A substantially direct current (DC) bias (V B ) is applied to the fixed bias comb (34a). A substantially constant voltage (V S+ ) is also exerted on a sense plate (18) beneath the proof mass (10). The sense plate (18) and bias comb (34a) are coupled to a charge amp (20) through capacitors (40a, 46a) such that transient currents induced by motion of the proof mass (10) will cause current to flow to a charge amp (20). |
