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发明名称
CHEMICALLY MODIFIED POLISHING PAD FOR CHEMICAL MECHANICAL POLISHING
摘要
申请公布号
EP1912760(A1)
申请公布日期
2008.04.23
申请号
EP20060787158
申请日期
2006.07.13
申请人
PPG INDUSTRIES OHIO, INC.
发明人
LI, YUZHUO;HELLRING, STUART D.;KELEHER, JASON;ZHANG, TIANXI
分类号
B24B37/04;B24D3/12;B24D3/34;H01L21/306;H01L21/321
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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