| 摘要 |
<p>An excimer laser apparatus having a discharge chamber and a method of operating the same are provided to obtain constant output of laser beam discharged to the outside through an outcoupler by automatically calculating an optimal position for the discharge chamber and moving it to the optimal position. An excimer laser apparatus comprises a discharge chamber(110), an outcoupler(130), a driving part(120), a measuring part(150), a controller(160), and a line narrowing module(140). The discharge chamber produces a laser beam. The outcoupler, installed on one side of the discharge chamber, discharges the laser beam within the discharge chamber to the outside. The driving part, installed below the discharge chamber, moves the discharge chamber to a plurality of measuring positions on a horizontal plane. The measuring part measures parameters related to the laser beam each time the discharge chamber is located on each measuring position, wherein the parameters comprise a voltage required for generating the laser beam within the discharge chamber, a bandwidth of the laser beam of output laser beam discharged from the outcoupler and energy sigma. The controller calculates an optimal position out of the measuring positions by using the measured parameters as an input data, and controls the driving part to move the discharge chamber to the optimal position. The line narrowing module installed opposite to the discharge chamber, comprising a bendable bandwidth reducing part reducing bandwidth of the laser beam, and a bandwidth driving part(142) connected to the bandwidth reducing part for bending the bandwidth reducing part.</p> |
