发明名称 ELECTRONIC DEVICE HANDLER FOR A BONDING APPARATUS
摘要 An electronic device handler for a bonding apparatus is provided to configure a system capable of automatically bonding an electronic device having a large bonding area without increasing a y-axis table range of a positioning table to place the electronic device under a bonding tool during a bonding process. A bonding apparatus(10) for electronic devices comprises a bonding tool(20), a storage assembly(16,18), a conveying track(12), and a rotary platform(14). An electronic device(22) for bonding is able to be located at the bonding tool. The storage assembly is configured to store multiple electronic devices. The conveying track carries the electronic device to make an access to or move back from the bonding tool, wherein the rotary platform can be operated between a point where the rotary platform is aligned to convey the electronic device between the rotary platform and the conveying track, and another point where the rotary platform is aligned with the storage assembly to convey the electronic device between the rotary platform and the storage assembly.
申请公布号 KR20080035500(A) 申请公布日期 2008.04.23
申请号 KR20070105404 申请日期 2007.10.19
申请人 ASM TECHNOLOGY SINGAPORE PTE LTD. 发明人 WONG YAM MO;SONG KENG YEW JAMES;KWAN KA SHING KENNY
分类号 H01L21/68;H01L21/677 主分类号 H01L21/68
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